Plasma Processing At The Nanoscale

Host University

Old Dominion University


Fall 2024


Electrical & Computer Engineering


Laroussi, Mounir

Course Information

The science and design of partially ionized plasma and plasma processing devices used in applications such as etching and deposition at the nanoscale. Gas phase collisions, transport parameters, DC and RF glow discharges, the plasma sheath, sputtering, etching, and plasma deposition.