Semiconductor Characterization

Host University

Old Dominion University

Semester

Fall 2022

Course Number

ECE 874 CRN 22493

Credits

3

Discipline

Electrical & Computer Engineering

Instructor

Baumgart, Helmut  (HBAUMGAR@ODU.EDU)

Course Information

Introduction of basic methods for semiconductor material and device characterization. Topics include resistivity, carrier doping concentration, contact resistance, Schottky barrier height, series resistance, channel length, threshold voltage, mobility, oxide and interface trapped charge, deep level impurities, carrier lifetime, and optical, chemical and physical characterization

Prerequisites

ECE 473 or ECE 573 or equivalent.