Semiconductor Characterization

Host University

Old Dominion University


Fall 2023


Electrical & Computer Engineering


Baumgart, Helmut

Course Information

Introduction of basic methods for semiconductor material and device characterization. Topics include resistivity, carrier doping concentration, contact resistance, Schottky barrier height, series resistance, channel length, threshold voltage, mobility, oxide and interface trapped charge, deep level impurities, carrier lifetime, and optical, chemical and physical characterization