Theory, design and fabrication of modern integrated circuits that consist of nano scale devices and materials. Topics include crystal growth and wafer preparation process including epitaxy, thin film deposition, oxidation, diffusion, ion implantation, lithography, dry etching, VLSI process integration, diagnostic assembly and packaging, yield and reliability
Semiconductor Process Technology
Old Dominion University
Electrical & Computer Engineering
Baumgart, Helmut (HBAUMGAR@ODU.EDU)
Times and Days
07:10 PM - 09:50 PM
ECE 473 or ECE 573.